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Proceedings Paper

New optical stylus sensor
Author(s): Ji-Hua Zhang; Bao Hua Zhuang; Shao-Qing Wang
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Paper Abstract

In this paper, an optical stylus displacement sensing principle has been studied, which serving a composite holographic optical element as an off-focus detection element. The mathematical models of optical measuring system have been established by means of Operator Algebra. The analysis results show that: the displacement of the tested surface is proportional to the image spot size on the detector. The sensibility of the sensor is obviously affected by the ratio of the equivalent focus length of the holographic optical element to the focus length of the objective lenses. To improve the measuring resolution and S/N ratio, so called off-plane detection method has been adopted. With which the output of the measuring results have a better linearity with the displacement of the tested surface. No less than 0.01 micrometers high resolution with linear measuring range of 5 micrometers have been obtained. Some measuring experiments are given.

Paper Details

Date Published: 4 January 1995
PDF: 6 pages
Proc. SPIE 2349, Industrial Optical Sensors for Metrology and Inspection, (4 January 1995); doi: 10.1117/12.198679
Show Author Affiliations
Ji-Hua Zhang, Tianjin Univ. (China)
Bao Hua Zhuang, Tianjin Univ. (China)
Shao-Qing Wang, Shandong Institute of Building Materials (China)


Published in SPIE Proceedings Vol. 2349:
Industrial Optical Sensors for Metrology and Inspection
Kevin G. Harding; H. Philip Stahl, Editor(s)

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