Proceedings PaperIMETRICS TP200: a system for high accuracy 3D image metrology
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High-Accuracy 3D Image Metrology now plays an increasingly important role in a variety of industrial and non-industrial settings, including in particular the area of industrial quality control. This can be directly attributed to the dramatic improvements that have taken place over the past several years in the techniques and algorithms used, as well as in the hardware that is currently available. This paper first gives an overview of factors influencing the geometric and radiometric characteristics of CCD-cameras and imaging systems used for 3D image metrology, which includes a discussion of various existing problem sources. Second, techniques for the geometric calibration of CCD-cameras for high-accuracy 3D image metrology are addressed. Third, elements of the IMETRICS TP200 System are outlined in order to demonstrate the hardware readily available on the market. Finally, a number of applications are shown in order to show the state-of-the-art. Results from numerous tests demonstrated that accuracies corresponding to 1/50th of a pixel spacing can be attained under severe industrial conditions.