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Proceedings Paper

Interferometer with two-frequency phase modulation
Author(s): Ilya Sh. Etsin; Michael G. Arkipov; Alexander G. Seregin
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Paper Abstract

The interference method of two-frequency phase modulation has been investigated both theoretically and experimentally as applied to displacement measurement and wavefront testing. Analysis of errors caused by shot noise, piezoceramic modulator hysteresis, modulating oscillations phase shift and their amplitudes deviations has been carried out. It is shown that phase measurement error of 2(pi) /180 can be obtained at real conditions.

Paper Details

Date Published: 12 December 1994
PDF: 9 pages
Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195950
Show Author Affiliations
Ilya Sh. Etsin, S.I. Vavilov State Optical Institute (Russia)
Michael G. Arkipov, S.I. Vavilov State Optical Institute (Russia)
Alexander G. Seregin, S.I. Vavilov State Optical Institute (Russia)


Published in SPIE Proceedings Vol. 2340:
Interferometry '94: New Techniques and Analysis in Optical Measurements
Malgorzata Kujawinska; Krzysztof Patorski, Editor(s)

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