Share Email Print
cover

Proceedings Paper

Dispersive white-light profilometer
Author(s): Johannes Schwider; Liang Zhou
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We demonstrate a new type of a white light profilometer which combines a two-beam Fizeau- type interferometer with a grating spectrometer to realize absolute measurements of the surface profile with high accuracy. Two evaluation methods are discussed and the experimental results show that a measurement repeatability of 0.4 nm can be reached.

Paper Details

Date Published: 12 December 1994
PDF: 7 pages
Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195934
Show Author Affiliations
Johannes Schwider, Univ. Erlangen-Nuernberg (Germany)
Liang Zhou, Univ. Erlangen-Nuernberg (Germany)


Published in SPIE Proceedings Vol. 2340:
Interferometry '94: New Techniques and Analysis in Optical Measurements
Malgorzata Kujawinska; Krzysztof Patorski, Editor(s)

© SPIE. Terms of Use
Back to Top