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Proceedings Paper

Recent progress in white-light interferometry
Author(s): Toyohiko Yatagai
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Paper Abstract

New techniques in white light interferometry and their fringe analysis methods are described. These applications in thickness and 3-D shape measurement and defects detection are reviewed.

Paper Details

Date Published: 12 December 1994
PDF: 8 pages
Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); doi: 10.1117/12.195930
Show Author Affiliations
Toyohiko Yatagai, Univ. of Tsukuba (Japan)


Published in SPIE Proceedings Vol. 2340:
Interferometry '94: New Techniques and Analysis in Optical Measurements
Malgorzata Kujawinska; Krzysztof Patorski, Editor(s)

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