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Proceedings Paper

Laser processing of Y1Ba2Cu3O7 superconducting thin films
Author(s): Peter A. Atanasov; Rumen I. Tomov; Valery S. Serbezov
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Paper Abstract

Superconducting Y1Ba2Cu3O7 thin films were prepared by in-situ oxygen plasma-assisted laser deposition. It was revealed that cw CO2 laser heating of substrate surface may be a method for reduction of particulate density. The buffer layers such as Ba(Sr)TiO3 and YSZ(111) were successfully experimented for preparation of good superconducting thin films. A multistep superfast CO2 laser annealing was investigated as a method of modification of the Y1Ba2Co3O7 thin films on Si. It is shown that N2 laser ablation may be a proper technique for patterning Y1Ba2Cu3O7 thin films. The films were characterized by EDAX, SEM, XRD and Raman spectroscopy.

Paper Details

Date Published: 12 December 1994
PDF: 9 pages
Proc. SPIE 2332, Second International Symposium on Advanced Laser Technologies, (12 December 1994); doi: 10.1117/12.195889
Show Author Affiliations
Peter A. Atanasov, Institute of Electronics (Bulgaria)
Rumen I. Tomov, Institute of Electronics (Bulgaria)
Valery S. Serbezov, Institute of Electronics (Bulgaria)


Published in SPIE Proceedings Vol. 2332:
Second International Symposium on Advanced Laser Technologies
Vladimir I. Pustovoy; Miroslav Jelinek, Editor(s)

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