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Proceedings Paper

Quality assurance of focused ion beam (FIB) repaired areas
Author(s): Koji Hiruta; Hideyuki Kanemitsu; Akira Morishige
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Paper Abstract

Laser repair is generally used to repair opaque defects on reticle because it can remove them without any damage. However, it doesn't have enough repair accuracy to repair next- generation reticles. So, we examined the shapes and optical intensity of the repaired areas to understand the damage that focused ion beam (FIB) would cause to these areas comparing laser repair and to apply it to practical reticle production line. From this study, it was shown that FIB forms deep V-grooves which cause changes in optical intensity on the repaired quartz area as a result of spattering and laser repair forms a smooth dent on the contrary. Therefore, a new opaque defect repair technique by FIB with gas assisted chemical etching system must be developed. In this paper, we address the results of metrology study of the repaired area by FIB and laser repair.

Paper Details

Date Published: 7 December 1994
PDF: 9 pages
Proc. SPIE 2322, 14th Annual BACUS Symposium on Photomask Technology and Management, (7 December 1994); doi: 10.1117/12.195827
Show Author Affiliations
Koji Hiruta, Fujitsu Ltd. (Japan)
Hideyuki Kanemitsu, Fujitsu Ltd. (Japan)
Akira Morishige, Fujitsu Ltd. (Japan)

Published in SPIE Proceedings Vol. 2322:
14th Annual BACUS Symposium on Photomask Technology and Management
William L. Brodsky; Gilbert V. Shelden, Editor(s)

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