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Proceedings Paper

Scanning local probe interferometer and reflectometer: application to very low relief objects
Author(s): O. Bergossi; Michel Spajer
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Paper Abstract

For the requirements of nanometrology, a new configuration of scanning interferometric profilometer, using a tapered fiber as emitting and detecting local probe, has been recently developed. The very large versatility allows a classical detection in far field, as well as a superresolution in near-field, for both transparent or nontransparent samples.

Paper Details

Date Published: 30 November 1994
PDF: 10 pages
Proc. SPIE 2341, Interferometry '94: Interferometric Fiber Sensing, (30 November 1994); doi: 10.1117/12.195546
Show Author Affiliations
O. Bergossi, Univ. de Franche-Comte/CNRS (France)
Michel Spajer, Univ. de Franche-Comte/CNRS (France)

Published in SPIE Proceedings Vol. 2341:
Interferometry '94: Interferometric Fiber Sensing
Eric Udd; Ralph P. Tatam, Editor(s)

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