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Proceedings Paper

Recent charge-coupled device optimization results at Steward Observatory
Author(s): Michael P. Lesser
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Paper Abstract

Recent research efforts aimed at optimizing charge-coupled devices (CCDs) after their manufacture to achieve maximum quantum efficiency, wide spectral bandpass, and excellent cosmetics and surface flatness are discussed. We present results of a new acid thinning agitation technique which produces very uniform, high quality surfaces on large area square and rectangular CCDs and 4" silicon wafers for back illuminated operation. In particular we present thinning results of Ford Aerospace 2048x2048 pixel CCDs. A method of cleaning thinned CCDs before antireflection coating for increased QE is also discussed. The results of initial experiments with a new packaging method to mount thinned CCDs while maintaining a very flat imaging surface are presented. This bump bonding mounting technique increases yield due to reduced handling and robust packaging and is expandable to tightly packed large area focal plane mosaics.

Paper Details

Date Published: 1 July 1990
PDF: 6 pages
Proc. SPIE 1242, Charge-Coupled Devices and Solid State Optical Sensors, (1 July 1990); doi: 10.1117/12.19449
Show Author Affiliations
Michael P. Lesser, Steward Observatory/Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 1242:
Charge-Coupled Devices and Solid State Optical Sensors
Morley M. Blouke, Editor(s)

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