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Proceedings Paper

Optical methods for the characterization of mechanical properties of thin silicon films
Author(s): Gilbert M. Tribillon; Bertrand Trolard; Patrick Delobelle; Eric Bonnotte; Luc Bornier
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Paper Abstract

Holographic interferometry and contouring are two optical methods used for the characterization of mechanical properties of thin films. Therefore, a phase measurement interferometry applied to these methods is explained. These solutions are discussed in terms of accuracy and sensibility. An application on a bulge test is proposed and experimental results are compared with finite element calculation. In each case, the good agreement between theory and experience allows us to validate the apparatus.

Paper Details

Date Published: 15 November 1994
PDF: 12 pages
Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); doi: 10.1117/12.194321
Show Author Affiliations
Gilbert M. Tribillon, Univ. de Franche-Comte (France)
Bertrand Trolard, Univ. de Franche-Comte (France)
Patrick Delobelle, Univ. de Franche-Comte (France)
Eric Bonnotte, Univ. de Franche-Comte (France)
Luc Bornier, Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 2248:
Optical Measurements and Sensors for the Process Industries
Christophe Gorecki; Richard W. T. Preater, Editor(s)

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