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Proceedings Paper

Absolute surface shape testing by means of an interferometric sensor
Author(s): Karl-Edmund Elssner; Andreas Vogel; Thomas Bluemel; Ricarda Kafka
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Paper Abstract

Testing of surface shapes by automatic interferometry is exact, quick, and comfortable, and therefore popular. It, however, suffers from drawbacks: The equipment is often quite voluminous and not exactly cheap, and the attainable accuracy is limited by the precision of the reference surface (relative testing). In cooperation with Fisba Optik AG we recently developed a matchbox-sized, cost-reduced interferometric surface shape sensor to overcome the first drawback. Furthermore we combined this sensor with methods for absolute calibration of the sensor or a reference surface resp. to clear the reference surface handicap. Absolute calibration methods are methods which measure surfaces independently from others with sufficient accuracy as compared to an ideal mathematical surface. We adapted our own developments of absolute flatness and sphericity testing for the surface shape inspection sensor. Further on we developed and adapted new methods for absolute cylindricity testing the importance of which is increasing as the usage of cylindrical surfaces of higher and certificated accuracy is rising.

Paper Details

Date Published: 15 November 1994
PDF: 6 pages
Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); doi: 10.1117/12.194315
Show Author Affiliations
Karl-Edmund Elssner, Berliner Institut fuer Optik GmbH (Germany)
Andreas Vogel, Berliner Institut fuer Optik GmbH (Germany)
Thomas Bluemel, Berliner Institut fuer Optik GmbH (Germany)
Ricarda Kafka, Berliner Institut fuer Optik GmbH (Germany)


Published in SPIE Proceedings Vol. 2248:
Optical Measurements and Sensors for the Process Industries
Christophe Gorecki; Richard W. T. Preater, Editor(s)

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