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Proceedings Paper

Surface profiling by frequency-domain analysis of white light interferograms
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Paper Abstract

Three-dimensional imaging interferometric microscopes have outstanding accuracy, provided of course that the test objects are sufficiently smooth and continuous. The present study shows that a white-light source and spatial-frequency domain analysis of the resulting interferograms can dramatically increase the range of application of interferometric surface profilers. This analysis breaks the white light up into its constituent colors and makes it possible to apply multiple-wavelength techniques to the problem of surface height measurement.

Paper Details

Date Published: 15 November 1994
PDF: 4 pages
Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); doi: 10.1117/12.194308
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Leslie L. Deck, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 2248:
Optical Measurements and Sensors for the Process Industries
Christophe Gorecki; Richard W. T. Preater, Editor(s)

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