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Proceedings Paper

Noncontact profiling of machined metal surfaces by fiber optic interferometry
Author(s): Duncan P. Hand; Thomas A. Carolan; James S. Barton; Julian D. C. Jones
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Paper Abstract

A rugged interferometric fiber optic instrument for non-contact profiling of optically rough, machined metal surfaces has been developed, designed for use on the machine tool. The sensor is a robust and compact interferometric probe which scans focused light across the test surface. A laser diode source and photodetector communicate with the sensor through an optical fiber, and the output is demodulated with a phase-stepping algorithm, achieved by frequency modulating the source. Operation is demonstrated with face-milled steel surfaces, with steep local gradients and local variations in reflectivity of a factor of 100,000. The measured horizontal resolution is 1.5 micrometers , and the noise-limited vertical resolution 0.3 nm/(root)Hz. Two additional manufacturing applications are demonstrated: in-situ profiling of diamond-machined surfaces and score dies.

Paper Details

Date Published: 15 November 1994
PDF: 8 pages
Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); doi: 10.1117/12.194306
Show Author Affiliations
Duncan P. Hand, Heriot-Watt Univ. (United Kingdom)
Thomas A. Carolan, Heriot-Watt Univ. (United Kingdom)
James S. Barton, Heriot-Watt Univ. (United Kingdom)
Julian D. C. Jones, Heriot-Watt Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 2248:
Optical Measurements and Sensors for the Process Industries
Christophe Gorecki; Richard W. T. Preater, Editor(s)

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