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Proceedings Paper

Soft x-ray reflectometer for large and complex samples using synchrotron radiation
Author(s): Detlef Fuchs; Michael K. Krumrey; Thomas Lederer; Peter Mueller; Frank Scholze; Gerhard Ulm
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Paper Abstract

At the radiometry laboratory of the Physikalisch-Technische Bundesanstalt a reflectometer for the soft x-ray spectral region is operated for several years utilizing monochromatic radiation from a toroidal grating monochromator or from a high resolution plane grating monochromator. The monochromators cover the photon energy region from 35 eV to 1500 eV. New challenges due to the development of soft x-ray optical components led to the design of a second reflectometer with advanced capabilities. Samples with a diameter of up to 250 mm can be accommodated. The time required for sample exchange is reduced by using a lock chamber. The feasibility of sample positioning with high precision has been improved. Typical uncertainties in the order of 1 - 2%, e.g. for the reflectance of multilayer mirrors, can be achieved. A detailed description of the reflectometer as well as some typical results showing the performance are presented.

Paper Details

Date Published: 11 November 1994
PDF: 9 pages
Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193157
Show Author Affiliations
Detlef Fuchs, Physikalisch-Technische Bundesanstalt/Berlin (Germany)
Michael K. Krumrey, Physikalisch-Technische Bundesanstalt/Berlin (Germany)
Thomas Lederer, Physikalisch-Technische Bundesanstalt/Berlin (Germany)
Peter Mueller, Physikalisch-Technische Bundesanstalt/Berlin (Germany)
Frank Scholze, Physikalisch-Technische Bundesanstalt/Berlin (Germany)
Gerhard Ulm, Physikalisch-Technische Bundesanstalt/Berlin (Germany)


Published in SPIE Proceedings Vol. 2279:
Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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