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Proceedings Paper

Bremsstrahlung optical monitoring system (BOMS) for in-situ spectral characterization and optical film thickness monitoring of electron beam evaporated x-ray coatings and multilayers: design concept
Author(s): Muamer Zukic; Michele Wilson McColgan; Douglas G. Torr; Alphonsus John Fennelly; Edward L. Fry
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Paper Abstract

It is well known that in addition to roughness control, the most critical factor in the fabrication of x-ray multilayers is the accuracy of film thickness monitoring. Thickness accuracy and reproducibility of the x-ray multilayer deposition process can be improved by compensating for the film thickness variations in subsequent layers. We report the design of the `Bremsstrahlung Optical Monitoring System' (BOMS) for in situ multilayer spectral reflectance measurements and individual film optical thickness monitoring. The designed monitoring system, BOMS, utilizes the bremsstrahlung that occur during an electron beam deposition as the x-ray source and two energy sensitive detectors for the reference and sample beam reflectance measurements. In addition, the BOMS will create a powerful tool for in situ multilayer design, thus providing fabricated x-ray coatings with ultimate spectral performance.

Paper Details

Date Published: 11 November 1994
PDF: 12 pages
Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); doi: 10.1117/12.193139
Show Author Affiliations
Muamer Zukic, Univ. of Alabama in Huntsville (United States)
Michele Wilson McColgan, Advanced Optical Systems (United States)
Douglas G. Torr, Univ. of Alabama in Huntsville (United States)
Alphonsus John Fennelly, Sentel Corp. (United States)
Edward L. Fry, Sentel Corp. (United States)

Published in SPIE Proceedings Vol. 2279:
Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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