Share Email Print
cover

Proceedings Paper

Influence of defect shape on laser-induced damage in multilayer coatings
Author(s): Mark R. Kozlowski; Robert J. Tench; Robert Chow; Lynn Matthew Sheehan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Atomic force microscopy (AFM) was used as a diagnostic for laser damage testing of micrometers -scale nodule defects in e-beam deposited HfO2/SiO2 multilayer mirror coatings. Earlier experiments in our laboratory showed a significant increase in damage susceptibility for defects with heights greater than 0.6 micrometers . In the present study, e-bean HfO2/SiO2R coatings from two additional vendors were also studied. Atomic force microscopy characterization of the defects showed that the defect shape became less 'classic' as the defect dimensions, especially height, increased. The characteristic shapes (spatter, multilobe, etc.) of the larger defects also varied between vendors. Using the AFM and optical microscopy, laser damage experiments (1064-nm, 3-ns pulses) were performed on various defects found in the coatings of the two new vendors. The data showed once again that the damage susceptibility increased as the height of the defect increased. There was also some difference between vendors in the damage susceptibility of the defects of a given size. Spatter defects, found predominantly in the coatings of one vendor, showed the highest susceptibility to damage.

Paper Details

Date Published: 4 November 1994
PDF: 8 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192151
Show Author Affiliations
Mark R. Kozlowski, Lawrence Livermore National Lab. (United States)
Robert J. Tench, Lawrence Livermore National Lab. (United States)
Robert Chow, Lawrence Livermore National Lab. (United States)
Lynn Matthew Sheehan, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

© SPIE. Terms of Use
Back to Top