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Proceedings Paper

Ion-beam-assisted deposition of thermally evaporated Cr thin films
Author(s): Chang Kwon Hwangbo; Kwang-Lim Yoo; Hyun-Ju Cho
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Paper Abstract

Optical, electrical, and microstructural properties of thermally evaporated Cr thin films assisted by the low-energy Ar ion beam were investigated. The result shows that the optical and electrical properties are close to those of the corresponding bulk Cr: both refractive index and extinction coefficient increase, reflectance increases, and electrical resistivity decreases. The tensile stress decreases while the grain size changes slightly. From this experimental study, it is found that the low-energy Ar ion beam bombardment on growing Cr films modifies the microstructure of Cr films to improve the optical and electrical properties.

Paper Details

Date Published: 4 November 1994
PDF: 7 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192133
Show Author Affiliations
Chang Kwon Hwangbo, Inha Univ. (South Korea)
Kwang-Lim Yoo, Inha Univ. (South Korea)
Hyun-Ju Cho, Inha Univ. (South Korea)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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