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Proceedings Paper

Molecular beam deposition of fluorides
Author(s): Sven Laux; Ute Kaiser; Wolfgang Richter
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Paper Abstract

A new technique for the fabrication of optical interference layers is being introduced. MgF2 and NdF3 have been evaporated by molecular beam deposition (MBD) in an ultrahigh vacuum system. The fluoride films are used in optical interference coatings for optical components of high power excimer lasers. The growth conditions were varied by changing the remaining gas composition, variation of the substrate temperature from 50 degree(s)C to 300 degree(s)C, and interruption of grain growth. The optical losses of the films were measured by transmission spectroscopy and laser calorimetry, and the film morphology was investigated by transmission electron microscopy. It was shown, that a stratification of very thin (1 nm - 10 nm) layers of two different fluorides can avoid the growth of large grains and wide columns, and gives rise to smoother surfaces. The packing density of MBD-films is higher in comparison with fluoride films deposited under conventional high vacuum conditions.

Paper Details

Date Published: 4 November 1994
PDF: 7 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192119
Show Author Affiliations
Sven Laux, Univ. Jena (Germany)
Ute Kaiser, Univ. Jena (Germany)
Wolfgang Richter, Univ. Jena (Germany)


Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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