Proceedings PaperNew source of energetic neutral particles
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We present a new tool for coating technology. Based on the known saddle field source we developed an improved neutral particle source for particle energies equivalent up to a few hundred eV. The desired energy can be selected by the operation mode. The energetic particles are neutrals. Therefore no problems arise with electric charging or with electrically caused absorption. The principal construction of the source is described. The main advantages are: no filament, no magnetic field, only dc high voltage, resistant to reactive gases.