Proceedings PaperComputer-integrated manufacturing of advanced thin film coatings
|Format||Member Price||Non-Member Price|
We have implemented a process control system, based on in-situ spectral photometry, for the manufacturing of advanced optical coatings. The coating process parameters as well as the theoretical design values, like refractive indices and thicknesses, are stored in a database for documentation. Based on the high accuracy of the spectral optical thickness control, several examples for advanced coatings with enhanced optical performances are given.