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Proceedings Paper

Computer-integrated manufacturing of advanced thin film coatings
Author(s): Harry H. Bauer; Erwin Nuessler
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Paper Abstract

We have implemented a process control system, based on in-situ spectral photometry, for the manufacturing of advanced optical coatings. The coating process parameters as well as the theoretical design values, like refractive indices and thicknesses, are stored in a database for documentation. Based on the high accuracy of the spectral optical thickness control, several examples for advanced coatings with enhanced optical performances are given.

Paper Details

Date Published: 4 November 1994
PDF: 5 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192116
Show Author Affiliations
Harry H. Bauer, Carl Zeiss (Germany)
Erwin Nuessler, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings

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