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Proceedings Paper

Energetic particles for vacuum deposition
Author(s): Hermann R. Dobler
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Paper Abstract

Conventional vacuum deposition had gradually been improved by a lot of special processes. We summarize the most important ones and give an evaluation of a few process parameters. The discussion is limited to optical coating on glass.

Paper Details

Date Published: 4 November 1994
PDF: 12 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192108
Show Author Affiliations
Hermann R. Dobler, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings

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