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Proceedings Paper

Glancing-incidence x-ray scattering by multilayers for XUV mirrors
Author(s): Jean-Pierre Chauvineau; Y. Chambet; C. Marliere
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Paper Abstract

Periodic Mo/Si multilayers designed for X-UV mirrors were made by ion beam sputtering deposition on float-glass, polished borosilicate glass and superpolished silicon substrates. Glancing incidence X-ray scattering from these multilayers was measured at first by fixing the incidence angle and varying the detection angle, and then by simultaneously varying the incidence and detection angles in such a way that the phase difference between the beams scattered by successive layers was kept constant. Based on the polarization distribution theory, a calculation of X-ray scattering from interface roughness accounts for the typical features observed on the experimental curves.

Paper Details

Date Published: 4 November 1994
PDF: 8 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192078
Show Author Affiliations
Jean-Pierre Chauvineau, Ctr. Univ. d'Orsay (France)
Y. Chambet, Ctr. Univ. d'Orsay (France)
C. Marliere, Ctr. Univ. d'Orsay (France)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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