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Proceedings Paper

Deposition of metal/dielectric multilayer filters
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Paper Abstract

The successful manufacture of metal/dielectric multilayer systems requires not only very close control of the thicknesses of the individual layers, but also a good knowledge of the optical constants of the materials they are made of. In the case of metal films, it is also essential to know whether any transition layers are formed at the interfaces and, if so, how their thicknesses and optical constants depend on the deposition conditions. Numerical modeling of the metal layers and their interfaces is a powerful tool for the determination of these parameters. To illustrate the method, a bandpass filer and a long-wavelength cut-off filter, both having a low reflectance for light incident on one side, were produced. Excellent agreement has been obtained between the calculated and the measured spectral transmittance and reflectance curves.

Paper Details

Date Published: 4 November 1994
PDF: 5 pages
Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); doi: 10.1117/12.192062
Show Author Affiliations
Brian Thomas Sullivan, National Research Council of Canada (Canada)
Jerzy A. Dobrowolski, National Research Council of Canada (Canada)

Published in SPIE Proceedings Vol. 2253:
Optical Interference Coatings
Florin Abeles, Editor(s)

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