Share Email Print

Proceedings Paper

Roughness measurement based on differential methods of scatterometry
Author(s): Valentina V. Azarova; Natalija M. Solovjeva
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Necessity of supersmooth optical radiation transparent surfaces and laser mirrors with minimum losses through scattering creation required the subsequent development of refiectometric nondestructive surface roughness measurement methods. There are the scalar theory of reflectivity from rough es' and the vector theory 2 have been worked out in the present time. The last of them takes in account interaction of the electromagnetic radiation with surface electrons and influence of the reflectivity material constants. There is the comparative analysis of the scattering light spatial distribution measurement methods given in this paper. The reflectivity radiation diffusion component is examined as a function of the statistical parameters root mean square (rms) surface roughness a, autocovariance length of the surface a and root mean square microfacet pitch tg y = a/a. There is the optical radiation transparent measurement method3 discussed in this work. The results of this measuring method for supersmooth surfaces were compared with theory and ones obtained with other methods and it was received good agreement. The connection of the scattering indicatrix with the parameters of the high quality laser mirrors has been described in this work. The methods which allow to measure back scattering and scattering "in mode" and influence this differential scattering to the interferometrical measurement devices parameters are discussed.

Paper Details

Date Published: 31 October 1994
PDF: 1 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192034
Show Author Affiliations
Valentina V. Azarova, Scientific Research Institute POLYUS (Russia)
Natalija M. Solovjeva, Scientific Research Institute POLYUS (Russia)

Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

© SPIE. Terms of Use
Back to Top