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Proceedings Paper

Diffractometry and scatterometry at the Institute of Applied Optics, Warsaw
Author(s): Marek Daszkiewicz
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Paper Abstract

The last 25 years of activity of the Wasaw Institute of Applied Optics (Instytut Optyki Stosowanej - IOS) (formerly Central Optical Laboratory) in diffractometry and scatterometry is presented. The methods of investigations and different types of apparatuses (especially diffractometers) developed in IOS are described. Examples of practical applications of diffractometry and scatterometry are shown.

Paper Details

Date Published: 31 October 1994
PDF: 12 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192029
Show Author Affiliations
Marek Daszkiewicz, Institute of Applied Optics (Poland)

Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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