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Proceedings Paper

Scatterometer and scatteroscope for testing optical surfaces
Author(s): Wieslaw Chabros; Leszek Rafal Staronski
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Paper Abstract

An instrument for measuring the roughness of optical surfaces was recently built in the Institute of Applied Optics. It is especially useful for testing highly polished surfaces of glass, silica, metals and for visualization of digs, scratches, surface microirregularities and dust particles. Results are compared with the rms surfaces roughness obtained by phase-stepping Differential Interference Contrast (DIC) technique and Total Integrated Scattering (TIS).

Paper Details

Date Published: 31 October 1994
PDF: 10 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192016
Show Author Affiliations
Wieslaw Chabros, Institute of Applied Optics (Poland)
Leszek Rafal Staronski, Institute of Applied Optics (Poland)

Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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