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Proceedings Paper

System for surface roughness control of plane and spherical very smooth surfaces
Author(s): Oleg V. Angelsky; Ivan A. Buchkovsky; Peter P. Maksimyak
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Paper Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop the methods for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion. The proposed diagnostic method is applicable to plane and spherical verysmooth surfaces. The sensitivity limit of the method in measuring the standard deviation of surface profile from base line is about 0.003 micrometers .

Paper Details

Date Published: 31 October 1994
PDF: 4 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192014
Show Author Affiliations
Oleg V. Angelsky, Chernovtsy Univ. (Ukraine)
Ivan A. Buchkovsky, Chernovtsy Univ. (Ukraine)
Peter P. Maksimyak, Chernovtsy Univ. (Ukraine)


Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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