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Proceedings Paper

Light scattering problems in confocal scanning microscopy
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Paper Abstract

Confocal imaging of rough surfaces is considered. The general principles apply not only to confocal systems but also to other interferometric systems using high aperture objectives or a broad band of illumination wavelengths. It is demonstrated that scattering by a rough surface can be described in terms of its 3D spectrum and the coherent transfer function of the imaging system. An effective transfer function for imaging of rough surfaces is developed, based on the Kirchhoff approximation. It is described how confocal imaging can be used for reconstruction of surface profiles in the Kirchhoff approximation.

Paper Details

Date Published: 31 October 1994
PDF: 8 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192013
Show Author Affiliations
Colin J. R. Sheppard, Univ. of Sydney (Australia)

Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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