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Proceedings Paper

Light scattering by conducting surfaces with one-dimensional roughness
Author(s): Kevin A. O'Donnell; Michael E. Knotts; T. R. Michel
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Paper Abstract

We describe experimental measurements of the scattering properties of two conducting surfaces with 1D roughness. The surfaces have been fabricated in photoresist and have been characterized with a stylus that is small compared to the surface correlation length. In studies of diffuse scatter, we present measurements of the four unique elements of the Stokes matrix. Backscattering enhancement and associated polarization effects are observed for the rougher surface while behavior consistent with tangent plane models is seen for the smoother surface. The polarization-dependence of the coherent scatter is also investigated, and comparisons are made with the results calculated for a flat surface. Finally, we briefly present results for the angular correlation functions of intensity, where the coherent effects that produce backscattering enhancement are more directly observed.

Paper Details

Date Published: 31 October 1994
PDF: 10 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192011
Show Author Affiliations
Kevin A. O'Donnell, Georgia Institute of Technology (United States)
Michael E. Knotts, Georgia Institute of Technology (United States)
T. R. Michel, Georgia Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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