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Proceedings Paper

Laser diffraction on the inclined narrow slit with the final thickness edges
Author(s): Iosif S. Zeilikovich
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Paper Abstract

The laser diffraction on the inclined narrow slit with the final thickness edges is investigated experimentally and theoretically. One should notice that Fresnel's diffraction integral is not correct for this case and it is necessary to take into account the repeated reflections of the laser radiation.

Paper Details

Date Published: 31 October 1994
PDF: 4 pages
Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192009
Show Author Affiliations
Iosif S. Zeilikovich, Grodno State Univ. (Belarus)


Published in SPIE Proceedings Vol. 1991:
Diffractometry and Scatterometry
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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