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Proceedings Paper

Noninterference method of optical surface roughness measurements
Author(s): V. V. Kalugin; A. V. Trofimov; V. L. Zuniga
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Paper Abstract

A construction and the action principle of the sensor of the form and position of the light beam is described. On the basis of the two such sensors there has been constructed an apparatus for measuring profiles and roughness of the quasi-mirror surfaces. The inhomogeneities detection was realized by the change of the energy center position of the beam and its form, the beam being reflected from the examined surface. The measurements results are appendixed.

Paper Details

Date Published: 31 October 1994
PDF: 5 pages
Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); doi: 10.1117/12.192001
Show Author Affiliations
V. V. Kalugin, Odessa State Univ. (Ukraine)
A. V. Trofimov, Odessa State Univ. (Ukraine)
V. L. Zuniga, Odessa State Univ. (Ukraine)


Published in SPIE Proceedings Vol. 2113:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergei V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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