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Proceedings Paper

Spectral diagnostics of microelectronic material surface structure with high spatial resolution
Author(s): I. P. Bobrovskaya; A. G. Chepilko; L. V. Levash; G. A. Puchkovskaya; M. Yu Vedula
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Paper Abstract

A device for spectral diagnostics of surface quality of real structures (crystals, ceramics, films) being used in modern microelectronics has been proposed. It consists of several selective IR leading semiconductor sources, an optical system, is executed on the basis of IR fibers, an unselective pyroelectric IR detector and a block of signal processing.

Paper Details

Date Published: 31 October 1994
PDF: 4 pages
Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); doi: 10.1117/12.191999
Show Author Affiliations
I. P. Bobrovskaya, Institute of Physics (Ukraine)
A. G. Chepilko, Institute of Physics (Ukraine)
L. V. Levash, Institute of Physics (Ukraine)
G. A. Puchkovskaya, Institute of Physics (Ukraine)
M. Yu Vedula, Institute of Physics (Ukraine)


Published in SPIE Proceedings Vol. 2113:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergei V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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