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Proceedings Paper

Photoacoustic spectro- and microscopy: new diagnostic methods for materials and devices for electronics
Author(s): Ivan V. Blonskij; V. G. Grytz; V. F. Kozenev; V. A. Thoryk; V. V. Semenov
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Paper Abstract

Structural schemes of photoacoustic microscope and photoacoustic spectrometer of original design are described and the results are presented on photoacoustic micro- and spectroscopy for porous silicon, high-temperature superconductors, layer semiconductors, elements of integrated circuits and other materials and devices for electronics.

Paper Details

Date Published: 31 October 1994
PDF: 11 pages
Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); doi: 10.1117/12.191990
Show Author Affiliations
Ivan V. Blonskij, Institute of Physics (Ukraine)
V. G. Grytz, Institute of Physics (Ukraine)
V. F. Kozenev, Institute of Physics (Ukraine)
V. A. Thoryk, Institute of Physics (Ukraine)
V. V. Semenov, Institute of Physics (Ukraine)


Published in SPIE Proceedings Vol. 2113:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergei V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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