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Proceedings Paper

Solid state surface spectroscopy using the ellipsometric characteristics of guided-wave and surface polaritons
Author(s): I. I. Burshta; Evgenie F. Venger; S. N. Zavadskii
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Paper Abstract

A new method is proposed for studying surfaces in the region of resonance interaction of electromagnetic radiation with surface elementary excitations. In this method the sample surface is illuminated through the ATR prism having a thin metallic layer on its base and ellipsometric angles of reflected beam are measured. We have studied ellipsometric parameters and sensitivity of GWP ellipsometry in measuring refraction and absorption indices at the surface. A substantial bettering of sensitivity was demonstrated.

Paper Details

Date Published: 31 October 1994
PDF: 5 pages
Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); doi: 10.1117/12.191968
Show Author Affiliations
I. I. Burshta, Institute of Semiconductor Physics (Ukraine)
Evgenie F. Venger, Institute of Semiconductor Physics (Ukraine)
S. N. Zavadskii, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 2113:
Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics
Sergei V. Svechnikov; Mikhail Ya. Valakh, Editor(s)

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