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Proceedings Paper

Fabrication of polygon mirror microscanner by surface micromachining
Author(s): H. Miyajima; K. Deng; Mehran Mehregany; Francis L. Merat; Shoichi Furukawa
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Paper Abstract

This paper describes the fabrication process and preliminary experimental results of a polygon mirror microscanner. The fabrication process is established by the integration of polysilicon surface micromachining and electroless plating of nickel. The scanner structures studied are similar to conventional mechanical polygon mirror scanners but utilize micromotors with diameters up to one millimeter. The micromotors are fabricated by polysilicon surface micromachining. The optical elements are hexagonal nickel reflectors up to 20 micrometers tall fabricated by selective electroless plating of nickel on the rotor of the micromotor. Successful fabrication of the micromotors with nickel reflectors on the motor has been demonstrated. Optical measurements have been performed at visible wavelength (633 nm) using multi-mode optical fibers for the source illumination positioned roughly in the plane of the substrate. The scanned, reflected radiation was detected via scattering from the substrate and by a television camera in the plane of the substrate.

Paper Details

Date Published: 21 October 1994
PDF: 12 pages
Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); doi: 10.1117/12.190931
Show Author Affiliations
H. Miyajima, Case Western Reserve Univ. (United States)
K. Deng, Case Western Reserve Univ. (United States)
Mehran Mehregany, Case Western Reserve Univ. (United States)
Francis L. Merat, Case Western Reserve Univ. (United States)
Shoichi Furukawa, Case Western Reserve Univ. (United States)

Published in SPIE Proceedings Vol. 2291:
Integrated Optics and Microstructures II
Massood Tabib-Azar; Dennis L. Polla; Ka-Kha Wong, Editor(s)

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