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Proceedings Paper

Micromachined free space integrated optics
Author(s): Ming C. Wu; Lih-Yuan Lin; Shi-sheng Lee
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Paper Abstract

We report a novel surface-micromachined micro-optical bench (MOB) technology which enables us to monolithically integrate 'flipped-up' free-space optical elements with micro-positioners and micro- actuators. This technology allows complete optical systems be implemented on a single Si chip using IC-like microfabrication processes. We have, for the first time, successfully fabricated micro-Fresnel lenses, mirrors, beam-splitters, gratings, and precision optical mounts, as well as rotational stages and other micro- positioners. Self-aligned hybrid integration with edge-emitting lasers and vertical cavity surface-emitting lasers (VCSEL) are also demonstrated for the first time. The MOB technology could significantly reduce the size, weight, and cost of most optical systems, and has a significant impact on optical switching, optical data storage, optoelectronic packaging.

Paper Details

Date Published: 21 October 1994
PDF: 12 pages
Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); doi: 10.1117/12.190929
Show Author Affiliations
Ming C. Wu, Univ. of California/Los Angeles (United States)
Lih-Yuan Lin, Univ. of California/Los Angeles (United States)
Shi-sheng Lee, Univ. of California/Los Angeles (United States)

Published in SPIE Proceedings Vol. 2291:
Integrated Optics and Microstructures II
Massood Tabib-Azar; Dennis L. Polla; Ka-Kha Wong, Editor(s)

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