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Proceedings Paper

Comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors
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Paper Abstract

Immense computational power of today's processors cannot be fully utilized unless appropriate sensors and actuators are developed to link them with the outside world. A method is presented here to compare different sensors with each other and to evaluate their relative merits. Sensors are decomposed into two essential building blocks: a sensor shell and a sensing mean. Eleven different types of sensors, having the same sensing shells, are analyzed and compared to each other.

Paper Details

Date Published: 21 October 1994
PDF: 18 pages
Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); doi: 10.1117/12.190901
Show Author Affiliations
Augusto Garcia-Valenzuela, Case Western Reserve Univ. (United States)
Massood Tabib-Azar, Case Western Reserve Univ. (United States)


Published in SPIE Proceedings Vol. 2291:
Integrated Optics and Microstructures II
Massood Tabib-Azar; Dennis L. Polla; Ka-Kha Wong, Editor(s)

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