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Proceedings Paper

Microelectromechanical systems using piezoelectric thin films
Author(s): Dennis L. Polla; P. J. Schiller; L. F. Francis
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Paper Abstract

Ferroelectric thin films have been integrated with silicon-based microelectromechanical systems, commonly called MEMS. Several thin films of the PZT family have been used in the formation of both microsensors and microactuators in processes compatible with silicon nitride, surface-micromachined, membranes and analog CMOS technology. Back-end micromachining of MEMS structures based on PZT-type electroceramic thin films is described. Several ferroelectric MEMS examples are described including (1) cantilever beam micro- accelerometer, (2) acoustic pressure sensor, (3) uncooled pyroelectric infrared imaging array, (4) integrated acoustic sensor, (5) micro- positioner, and (6) simple cantilever flap actuators. Major issues of merging technologies with ferroelectric thin films with microelectromechanical structures and on-chip electronics are described.

Paper Details

Date Published: 21 October 1994
PDF: 17 pages
Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); doi: 10.1117/12.190900
Show Author Affiliations
Dennis L. Polla, Univ. of Minnesota (United States)
P. J. Schiller, Univ. of Minnesota (United States)
L. F. Francis, Univ. of Minnesota (United States)

Published in SPIE Proceedings Vol. 2291:
Integrated Optics and Microstructures II
Massood Tabib-Azar; Dennis L. Polla; Ka-Kha Wong, Editor(s)

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