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Proceedings Paper

Fiber optic temperature sensor using laser-annealed silicon film
Author(s): Glenn Beheim; Jorge L. Sotomayor; Meg L. Tuma; Massood Tabib-Azar
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Paper Abstract

A fiber-optic temperature sensor used a polysilicon thin-film Fabry- Perot etalon. An amorphous silicon film is sputter deposited directly onto a fiber end, crystallized using an argon ion laser, and then encapsulated by two sputter deposited films. Since silicon's refractive index is strongly temperature dependent, the location of one of the minima in the etalon's spectral reflectance can be used to determine the sensed temperature. The annealing process is a critical step in producing a stable sensor. This process is characterized, and the results of long-term sensor stability tests are presented.

Paper Details

Date Published: 21 October 1994
PDF: 7 pages
Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); doi: 10.1117/12.190897
Show Author Affiliations
Glenn Beheim, NASA Lewis Research Ctr. (United States)
Jorge L. Sotomayor, NASA Lewis Research Ctr. (United States)
Meg L. Tuma, NASA Lewis Research Ctr. (United States)
Massood Tabib-Azar, Case Western Reserve Univ. (United States)


Published in SPIE Proceedings Vol. 2291:
Integrated Optics and Microstructures II
Massood Tabib-Azar; Dennis L. Polla; Ka-Kha Wong, Editor(s)

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