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Proceedings Paper

Monitoring of YBCO thin film constituent in magnetron sputtering on line
Author(s): Zhuangjin Zhang; Longjian Liu; Jie Shen; Zhongyi Hua
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Paper Abstract

The constituents of the YBCO thin films deposited by DC magnetron sputtering will deviate from that of the target. The origin of that deviation was discussed and a method to monitor the film constituent was raised by measuring the intensity of each individual persistent line of yttrium, barium and copper from the discharge region.

Paper Details

Date Published: 26 October 1994
PDF: 4 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190818
Show Author Affiliations
Zhuangjin Zhang, Fudan Univ. (China)
Longjian Liu, Fudan Univ. (China)
Jie Shen, Fudan Univ. (China)
Zhongyi Hua, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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