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Proceedings Paper

1H NMR studies of PETEOS SiO2
Author(s): Yihua He; Guang Yang; Huanzhang Fan; Chun Fang Xu; Xuewen Wu
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Paper Abstract

1H NMR spectra were obtained for the Plasma-Enhanced Tetraethylorthosilicate (PETEOS) SiO2 film. The 1H spectra consisted of two components with different linewidths, being separated into a narrow Lorentzian and a broad Gaussian. The linewidths narrowed with increasing temperature.

Paper Details

Date Published: 26 October 1994
PDF: 3 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190800
Show Author Affiliations
Yihua He, East China Normal Univ. (China)
Guang Yang, East China Normal Univ. (China)
Huanzhang Fan, East China Normal Univ. (China)
Chun Fang Xu, East China Normal Univ. (China)
Xuewen Wu, East China Normal Univ. (China)

Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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