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Proceedings Paper

X-ray reflectivity analysis of Pt/Co multilayered films
Author(s): Zhihong Jiang; Chang-Lin Kuo; Rongfa Guo; Defang Shen; Tian-Shen Shi
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Paper Abstract

Pt/Co multilayered films were prepared by DC sputtering and electron beam evaporation and grazing angle X-ray reflectivity analysis was used to determine the film structure. It was found that the interfaces of the evaporated samples became flatter and more obscure when the substrate temperature rose. The sputtered samples had relatively flat interfaces and the atoms were more closely packed than the evaporated samples.

Paper Details

Date Published: 26 October 1994
PDF: 5 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190755
Show Author Affiliations
Zhihong Jiang, Shanghai Institute of Metallurgy (China)
Chang-Lin Kuo, Shanghai Institute of Ceramics (China)
Rongfa Guo, Shanghai Institute of Ceramics (China)
Defang Shen, Shanghai Institute of Metallurgy (China)
Tian-Shen Shi, Shanghai Institute of Metallurgy (China)


Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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