Share Email Print
cover

Proceedings Paper

Optical performance of Mo/Si multilayer coated lamellar phase grating in soft x-ray domain
Author(s): Lixiang Yuan; Zhengxiu Fan; Kui Yi; Gongjie Yin; Jian-Da Shao; Mingqi Cui; Xiaoliang Shen
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The fabrication and characterization of soft X-ray multilayer lamellar phase gratings are given simply in this paper. The measurement of optical performance of soft X-ray multilayer phase grating at Beijing Synchrotron Radiation Facility is described in detail. The measurement results are analyzed and also compared with the theory predication.

Paper Details

Date Published: 26 October 1994
PDF: 6 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190754
Show Author Affiliations
Lixiang Yuan, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics (China)
Gongjie Yin, Shanghai Institute of Optics and Fine Mechanics (China)
Jian-Da Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Mingqi Cui, Institute of High Energy Physics (China)
Xiaoliang Shen, Fudan Univ. (China)


Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications

© SPIE. Terms of Use
Back to Top