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Proceedings Paper

Study of soft x-ray multilayer thin film
Author(s): Zhengxiu Fan; Jian-Da Shao; Kui Yi; Gongjie Yin; Lixiang Yuan
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Paper Abstract

In this paper, normal incidence soft x-ray multilayer mirrors for 23.4 nm, 8.89 nm, and 4.47 nm have been fabricated by planar magnetron, the multilayer is characterized with low angle x-ray diffraction and TEM technique. The absolute reflectivity is measured at the synchronization radiation facility.

Paper Details

Date Published: 26 October 1994
PDF: 6 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190753
Show Author Affiliations
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Jian-Da Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics (China)
Gongjie Yin, Shanghai Institute of Optics and Fine Mechanics (China)
Lixiang Yuan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications
Shixun Zhou; Yongling Wang; Yi-Xin Chen; Shuzheng Mao, Editor(s)

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