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Proceedings Paper

Amorphous silicon nitride binary-phase optical elements
Author(s): Xinfan Huang; Wenqi Gao; Zhifeng Li; Xiaofeng Gu; Jin Zhou; Kun-Ji Chen
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Paper Abstract

We report a new type of binary-phase optical beam splitters combined with a two-dimensional Dammann grating and a Fresnel zone plate as one element which has both functions of beam splitting and focussing. Amorphous silicon nitride (a-SiNx:H) thin films deposited by plasma enhanced chemical vapor deposition (PECVD) method have been used for fabricating such an optical element. We have obtained 3 X 3 arrays of equal intensity and focused beams which generated by the beam splitter based on our own design. The relative distribution error of the intensity in each beam of the array is less than 5%.

Paper Details

Date Published: 26 October 1994
PDF: 5 pages
Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); doi: 10.1117/12.190750
Show Author Affiliations
Xinfan Huang, Nanjing Univ. (China)
Wenqi Gao, Nanjing Univ. (China)
Zhifeng Li, Nanjing Univ. (China)
Xiaofeng Gu, Nanjing Univ. (China)
Jin Zhou, Nanjing Univ. (China)
Kun-Ji Chen, Nanjing Univ. (China)


Published in SPIE Proceedings Vol. 2364:
Second International Conference on Thin Film Physics and Applications

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