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Proceedings Paper

Diffraction method for testing a periodic microstructure
Author(s): Voldemar Petrovich Koronkevich; Galina A. Lenkova
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Paper Abstract

A method and experimental setup have been developed for testing the parameters (a pitch, pitch regularity, a gap- to-pitch, amplitude transmission and phase delay) of a periodic microstructure at different stages of fabrication. The method is based on measuring the distribution of light intensity in the diffraction spectrum of a grating. Experimental results on the quality of tracks of a photomask and master grating are presented.

Paper Details

Date Published: 12 October 1994
PDF: 8 pages
Proc. SPIE 2169, Nonconventional Optical Imaging Elements, (12 October 1994); doi: 10.1117/12.190212
Show Author Affiliations
Voldemar Petrovich Koronkevich, Institute of Automation and Electrometry (Russia)
Galina A. Lenkova, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 2169:
Nonconventional Optical Imaging Elements
Jerzy Nowak; Marek Zajac, Editor(s)

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