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Proceedings Paper

Pattern projection by conventional or diffractive optics: a comparison
Author(s): Christiaan H. F. Velzel; Frank Wyrowski
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Paper Abstract

Pattern projection is an important application area of diffractive optics, comprising microlithography and laser materials processing. We discuss differences in performance and requirements between pattern projection with conventional imaging optics and with diffractive optics.

Paper Details

Date Published: 12 October 1994
PDF: 7 pages
Proc. SPIE 2169, Nonconventional Optical Imaging Elements, (12 October 1994); doi: 10.1117/12.190211
Show Author Affiliations
Christiaan H. F. Velzel, Philips Ctr. for Manufacturing Technology (Germany)
Frank Wyrowski, Philips Ctr. for Manufacturing Technology (Germany)


Published in SPIE Proceedings Vol. 2169:
Nonconventional Optical Imaging Elements
Jerzy Nowak; Marek Zajac, Editor(s)

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