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Proceedings Paper

Precision cleaning using carbon dioxide jet spray
Author(s): Herbert C. Bitting
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Paper Abstract

Traditional solvent-based precision cleaning methods are becoming increasingly unsatisfactory due to harsher environmental regulations and more stringent cleanliness requirements. The carbon dioxide (CO2) solid/gas jet spray cleaning technique is a superior, environmentally compatible, nonabrasive alternative cleaning technology. Experimental results demonstrating 100% removal of submicron-size particles and several types of molecular films from a variety of substrates are presented.

Paper Details

Date Published: 19 October 1994
PDF: 16 pages
Proc. SPIE 2261, Optical System Contamination: Effects, Measurements, and Control IV, (19 October 1994); doi: 10.1117/12.190155
Show Author Affiliations
Herbert C. Bitting, Hughes Aircraft Co. (United States)

Published in SPIE Proceedings Vol. 2261:
Optical System Contamination: Effects, Measurements, and Control IV
A. Peter M. Glassford, Editor(s)

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