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Proceedings Paper

Mass flux response comparisons of a 200-MHz surface acoustic wave (SAW) resonator microbalance to a 15-MHz thermoelectric quartz crystal microbalance (TQCM) in a high-vacuum environment
Author(s): Donald A. Wallace; William D. Bowers
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Paper Abstract

Using a 200 MHz Surface Acoustic Wave (SAW) resonator device as a high-vacuum molecular deposition microbalance, similar to a bulk quartz crystal microbalance (QCM), and an often-used 15 MHz thermoelectric QCM (TQCM), a comparison of various parameters was made during a high-vacuum outgassing experiment. The source of molecular outgassing was a bright aluminum foil which was cooled to liquid nitrogen temperature and alternately, to ambient temperature. The two sensors, the SAW QCM and the TQCM were placed next to each other and viewed only the aluminum foil. In this high-vacuum environment, a comparison between various parameters, i.e., mass sensitivity, long term drift rate, stability, thermal effects and dynamic range of the SAW and the TQCM, was obtained.

Paper Details

Date Published: 19 October 1994
PDF: 15 pages
Proc. SPIE 2261, Optical System Contamination: Effects, Measurements, and Control IV, (19 October 1994); doi: 10.1117/12.190148
Show Author Affiliations
Donald A. Wallace, QCM Research (United States)
William D. Bowers, Femtometrics (United States)

Published in SPIE Proceedings Vol. 2261:
Optical System Contamination: Effects, Measurements, and Control IV
A. Peter M. Glassford, Editor(s)

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