Share Email Print

Proceedings Paper

OMNISCATR: a high-speed high-resolution three-dimensional scatterometer measures complex scatter interference and diffraction patterns
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

With OMNISCATR's high resolution and three-dimensional light scatter measurement capabilities, a new method is now available for analyzing surface and material properties such as tooling or etching patterns, contamination, and bulk defects. Scatter data from patterned wafers, sub-micron grit particles, and defective interocular lenses is presented.

Paper Details

Date Published: 7 October 1994
PDF: 13 pages
Proc. SPIE 2260, Stray Radiation in Optical Systems III, (7 October 1994); doi: 10.1117/12.189218
Show Author Affiliations
Raymond J. Castonguay, Breault Research Organization, Inc. (United States)

Published in SPIE Proceedings Vol. 2260:
Stray Radiation in Optical Systems III
Robert P. Breault, Editor(s)

© SPIE. Terms of Use
Back to Top